Details
0090-35134 Packard-Hughes Interconnect Electrostatic Chuck (Pull)
Designed for use in demanding semiconductor manufacturing environments. The Packard-Hughes chuck incorporates a puncture-resistant layer, often made of fibers embedded in resin, beneath the top insulating layer. To achieve a perfectly flat top surface, a specialized manufacturing process using a polished mandrel is employed. This design aims to provide robust performance and maintain excellent thermal control during semiconductor processing by facilitating uniform gas distribution for backside cooling.
Certificate of Conformance - Nelms-Donham Machining Inc. 7/18/96
Used * No longer available for export
MFR: Packard-Hughes Interconnect
Additional Information
Featured Product | No |
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Made in the USA | Yes |
GTIN | No |
ISBN | No |
NATO Stock Number | No |
Manufacturer Part Number | No |
Manufacturer | No |
Condition | Used |
NOS | No |
Call For Price | No |
Manufacturer Name | Packard-Hughes Interconnect |